I have a 2013 6.6 Duramax with 156,000 miles. I am getting the following codes; P11CB NOx Sensor 1 Performance - Signal High, P140C Exhaust Gas Recirculation (EGR) Slow Response - Decreasing Flow, and P0101 Mass or Volume Air Flow A Circuit Range/ Performance. I realize they are all emissions issues and likely caused by each other. What came first? Any suggestions as to where to start?